Magnification Reference Standards & Stage Micrometers
Geller MicroAnalytical Laboratory offers a variety of magnification reference standards (also called stage micrometers). These are patterned devices that are placed in the sample position in optical, scanning electron, Vision Systems and all types (STM, AFM, etc.) of scanning probe microscopes. For a discussion on magnification accuracy in the SEM click here. To see an interesting application where NIST tested their molecular measurement maching (M3) using the MRS-4 click here.
For a discussion on cleaning and recertification click here.
Three different devices are currently available. They are all traceable, under our ISO-17025 scope of accreditation, to national laboratories (either NPL - National Physical Laboratory in the U.K. or NIST in the U.S.A.). By mutual recognition agreements amongst the national laboratories being traceable to one laboratory is tantamount to being traceable to another.
All of our standards are "pitch" standards which means that measurements are transferable from one type of microscopy to another. Our resource guides, available below, explain this concept in detail. Just click on the links below for the PDF files.
MRS-3 – magnifications from 10X to 50,000X. 2µm pitch minimum. Traceable to the national laboratory. For ISO-9000 and ISO-17025
MRS-4 – magnifications from 10X to 200,000X. 0.5µm pitch minimum. Traceable to the national laboratory. For ISO-9000 and ISO-17025. The new MRS-4.2 has additional 1 and 2 µm pitch patterns for compliance with ISO-16700 calibration.
MRS-5 – magnifications from 1,000X to 1,000,000X. 80nm pitch minimum. Traceable to the national laboratory. For ISO-9000 and ISO-17025
MRS-3 is a chromium on glass standard that allows calibration from 10X to 50,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 2 µm. All of the patterns shown in the resource guide are included.
MRS-3-ITO is a chromium on ITO (indium tin oxide conductive coating on glass) standard that allows calibration from 10X to 50,000X. The standard is useful for XPS, x-ray resolution and ion beam imaging. The overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 2 µm. All of the patterns shown in the resource guide are included.
MRS-4.2 is a chromium on glass standard that allows calibration from 10X to 200,000X. the overall size is 9 X 9 X 2.3 mm thick. The minimum pitch is 1/2 µm.
MRS-Cert of Measurement Check out our improved data with reduced uncertainties for the MRS-3 and MRS-4.
MRS traceability information Certification measurement locations, re-certification & cleaning information for the MRS-3 and MRS-4
MRS-5 (discontinued) - replaceed by the MRS-6
MRS--6 (resource guide) is a 15nm thin film of chromium on silicon standard that allows calibration from about 1,000X to 1,000,000X. with an uncertainty of 3nm! The minimum pitch is a very well defined 80 nm! Important - see new cleaning instructions on page 2. Click here for new MRS-5 and MRS-6 Retainer
MRS-6 Certificate of Measurement & Traceability Information with all the details you want to know
MR-1, Micro-Ruler is a chromium on glass standard that has a 150 mm long scale with 0.010 mm increments. Accuracy is +/- 2.5 µm over it's length.
MR-1 Certificate of Measurement
Retainers for the MRS-3 and MRS-4
For further information click here
25φ X 3 mm 26 X 44 X 3 mm
MRS SEM/R -------------------- MRS OMR
Base material: Aluminum (6061-T6 )
Finish coating: electroless nickel (≈10µm thickness)